AGM showcases a line of high quality Optical MEMS and micromirror-based products including the MEMS Variable Optical Attenuator (MEMS VOA) and the Two Axis Micromirror (1xN MEMS) Chip for Optical Switch and Other Applications. AGM products have been successfully deployed in Optical Networks throughout Asia, Europe, and North America.

mems voaESVOA MEMS Chips

This line of AGM products has been in production for several years and is regularly shipping to customers in Asia and North America. The AGM ESVOA (Electrostatic Variable Optical Attenuator) MEMS chip enables the core functionality for our customers’ VOA products. The MEMS chip that AGM supplies is packaged by our customers into a fully functioning Variable Optical Attenuator (VOA) product that typically looks like the one shown.
The image at right shows a complete commercial VOA product, in which the AGM ESVOA MEMS chip has been packaged inside of a metal can, with optical fibers shown at left and electrical leads at right.

Advantages of the AGM ESVOA MEMS chip include superior optical performance, high attenuation (> 45dB), stable and repeatable attenuation, low temperature dependence, and good resistance to mechanical shock and vibration. The product has been deployed in field use by major customers for a number of years and as such, it has reached a level of product maturity. AGM supports its products once they move into the production phase with continuing customer support to address issues that may arise in the course of packaging and deployment.
Product specifications for Low Voltage and High Voltage MEMS chip products are contained in the specification sheet available in pdf format at the link below.

Spec Sheet – LV and HV MEMS chips for Electrostatic Variable Optical Attenuation


Two Axis MEMS Chips for 1xN Optical Switch and Other Applications

This line of AGM products signifies a robust and growing area of development for AGM, one that shows much promise for meeting customer roadmaps for more optical functionality. It extends the scope of the core MEMS technology that represents AGM’s expertise.

The AGM Two Axis Micromirror (2D MEMS) product was developed to enable 1xN optical switch products,
2d mirror for Optical Switch Applicationsand is successfully deployed in 1×4, 1×8, 1×16, and 1×32 optical switches. These devices can be packaged in TO46 or TO39 headers, or ceramic surface mount packages allowing for smaller size and lower production costs. The AGM MEMS chip offers superior optical performance. The mirror angle is very stable and repeatable over time, and offers low susceptibility to shock, vibration, and temperature changes.

The AGM Two Axis Micromirror technology has also been successfully employed for applications related to Tunable Filter and Optical Channel Monitor (OCM). In addition, AGM is exploring applications of this technology in the emerging areas of 3D imaging, LIDAR and free space optical communication. An evaluation kit offered by AGM, including the 2D MEMS chip along with PCB driver board enables customers to explore the potential applications of this novel technology.

Product specifications for the 2D MEMS 1xN Chip are available in pdf format at the link below.

Spec Sheet – AGM MEMS Chip for 1 x N Optical Switches and other Applications


AGM 2D MEMS Chip in TO39 Header

mems header

This product features the AGM Two Axis MEMS Chip mounted on a TO39 header with a hermetic glass window cap. The chip has been die-attached to the header with bondpads wirebonded to the leads, so the micromirror can easily be actuated by applying voltage to the drive pins. The TO39 is an industry standard package that can be conveniently used for applications in Fiber-optics, LIDAR, Biomedical, and other Optical applications.

Details about this product are given in pdf format below.

Spec Sheet – AGM 2D MEMS Chip in TO39 Header



Driver Board for 2D MEMS Chip

mems driver PCB

The 2D MEMS Driver Board provides the necessary drive circuitry for the 2D MEMS Chip and Header, allowing the user to control four analog voltages between 0 and 60V that actuate the MEMS mirror. The required power supply for the driver PCB is 3.3V/5V. The 26-pin connector on its back side is designed for connecting to the Raspberry Pi but it will work with any SPI hardware. The 6-pin connector on its front side is designed to connect to the MEMS Header with a ribbon cable.

Further details about this product are given in pdf format below.

Spec Sheet – Driver Board for 2D MEMS Chip



Future Product Development

AGM is currently developing further products in the Optical MEMS space, and is open to product requests from prospective customers to meet their specific needs.

Please contact AGM for further information, product availability, and pricing.